专利名称:Optical configuration for measurement
device using emitter material configurationwith quadrant photodetectors
发明人:David William Sesko申请号:US15625835申请日:20170616公开号:US10006757B1公开日:20180626
专利附图:
摘要:A scanning probe responsive in 3 axes is provided for use in a coordinatemeasuring machine. The scanning probe includes a frame, a stylus suspension portion and
a stylus position detection portion. The stylus position detection portion includes a lightsource and a position indicating element that is fixed relative to the stylus couplingportion and that includes at least one emitter portion having an emitter material (e.g.,phosphor) that inputs and absorbs light from the light source and responds by
outputting excitation light. In various implementations, the excitation light is directed asmeasurement light along a measurement spot path (e.g., including a telecentric imagingconfiguration) to form a measurement spot at a spot location on a position sensitivedetector (e.g., a quadrant-type photodetector), for which the spot location changes inresponse to a corresponding change in a position of the position indicating element andthe stylus coupling portion.
申请人:Mitutoyo Corporation
地址:Kanagawa-ken JP
国籍:JP
代理机构:Seed IP Law Group LLP
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