专利名称：MICRO COIL APPARATUS AND
MANUFACTURING METHODS THEREFOR
发明人：Adi BARAM,Matan Naftali,Sharon
Hornstein,Inbal Herer,Menashe Yehiel
申请号：US13422082申请日：20120316
公开号：US20120235779A1公开日：20120920
专利附图：
摘要：A method for manufacturing a conductive coil, the method comprising using asemiconductor fabrication process (e.g. TSV) to manufacture a coil, typically a planar
spiral conductive coil.
申请人：Adi BARAM,Matan Naftali,Sharon Hornstein,Inbal Herer,Menashe Yehiel
地址：Yoqneam IL,Moshav Aloney-Aba IL,Pardes Hanna IL,Kibbutz Ramat HashofetIL,Moshav Yogev IL
国籍：IL,IL,IL,IL,IL
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