专利名称:METHOD FOR ORGANIC THIN FILM
FORMATION
发明人:KIMURA, Nobuo,FUJITA, Yoshitaka,HIDAKA,
Tomoya
申请号:EP05766433.6申请日:20050721公开号:EP1797967B1公开日:20170913
摘要:An organic thin film forming method for forming an organic thin film on asubstrate surface comprising: contacting the substrate with a solution for forming anorganic thin film obtained from an auxiliary agent for forming an organic thin filmobtained by mixing a metal surfactant (1) having at least one hydrolytic group and acompound capable of interacting with the metal surfactant (1), and a metal surfactant (2)having at least one hydrolytic group, in an organic solvent, wherein a solution for formingan organic thin film is used in which the moisture content has been adjusted or maintainedto be within a predetermined range; an organic thin film forming method for forming anorganic thin film on a substrate surface comprising: contacting the substrate with anorganic solvent solution obtained by mixing a metal surfactant having at least onehydrolytic group and a catalyst capable of interacting with the surfactant, wherein theorganic solvent solution contains a predetermined amount of moisture, and contains 20to 2000 ppm of a hydroxide group-containing compound which is a hydrolysis product ofthe metal surfactant; and, an auxiliary agent for forming an organic thin film and asolution for forming an organic thin film used in this method.
申请人:NIPPON SODA CO
地址:JP
国籍:JP
代理机构:Wibbelmann, Jobst
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