专利名称：Microdeposition system
发明人：CHARLES O. EDWARDS,DAVID ALBERTALLI申请号：AU2002360448申请日：20021127
公开号：AU2002360448A8公开日：20040623
摘要：A kind of droplet of microdeposit fluent material is to determine the
microdeposition system of pattern image on substrate.Determine the pattern image ofsubstrate.For pattern image produces mask, this mask reduces density of defects tooccur owing to the nozzle fault of microdeposition heads.According to the droplet of thismask microdeposit fluent material on substrate, to determine the subcharacter ofpattern image.Specify a nozzle of microdeposition heads for each subcharacter in thepattern image.Can at random or utilize the alternate manner given nozzle.Given nozzleon the mask is distributed in repeatedly the moving past of microdeposition heads one.
申请人：LITREX CORPORATION
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