专利名称:Automatic repair data editing system
associated with repairing system forsemiconductor integrated circuit device
发明人:Maeda, Tetsunori, c/o NEC Corporation申请号:EP94118038.2申请日:19941115公开号:EP0654739A1公开日:19950524
专利附图:
摘要:An automatic repair data editing system is associated with a repairing system(25) rescuing defective semiconductor memories (MM) fabricated on semiconductor
wafers (WF) from rejection for editing repair data partially duplicated due to a trouble inthe repairing system, and allows the repairing system to automatically carry out a repairwork on the defective semiconductor memories (MM) for preventing the repair datafrom a mistake of an operator (26).
申请人:NEC CORPORATION
地址:7-1, Shiba 5-chome Minato-ku Tokyo JP
国籍:JP
代理机构:Glawe, Delfs, Moll & Partner
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